|Microelectromechanical systems (MEMS) are mechanical sensors and actuators that are fabricated using techniques similar to those used for integrated circuits. They are micrometer-sized mechanical structures, such as cantilevers, combs, membranes, and channels that are often integrated with logic circuitry. MEMS can act as sensors (receiving information from the environment) or as actuators (responding to the control system to change the environment).
The iNEMI MEMS Technology Working Group (TWG) was established in 2010 and published the first MEMS Chapter in 2011. The TWG joined the International Technology Roadmap for Semiconductors (ITRS) in 2011 and published the ITRS MEMS Chapter in 2012 and 2013. The iNEMI MEMS TWG is also affiliated with the MEMS Industry Group (MIG).
This 2015 edition of the iNEMI MEMS Chapter is a complete rewrite from its 2013 publication. It incorporates the information and direction developed by the ITRS, including the Technology Requirements Tables that are a hallmark of the ITRS roadmapping process.
The MEMS TWG has 16 direct contributors who predominantly come from industry. Several of the TWG contributors are also participants of MIG and/or the ITRS. In addition to providing industry guidance, this chapter drives the iNEMI collaborative agenda for the group's MEMS work.